Custom Fused Quartz Rod Boats for Semiconductor Applications

Custom Fused Quartz Rod Boats for Semiconductor Applications

We specialize in manufacturing high-purity fused quartz rod boats, precisely customized to meet the stringent demands of semiconductor processing. Our quartz rod boats are engineered from premium synthetic fused silica, ensuring exceptional properties critical for advanced fabrication.

These custom boats offer outstanding thermal stability, with an extremely low coefficient of thermal expansion to prevent deformation and stress during rapid temperature cycles in diffusion, oxidation, and LPCVD furnaces. Their high chemical purity guarantees excellent resistance to devitrification and minimal contamination, protecting sensitive wafer batches from metallic impurities. The inherent optical clarity also allows for precise process monitoring.

Every component is meticulously fabricated based on your specific drawings and requirements, including unique configurations, slot designs, and handling features. We ensure dimensional accuracy and superior surface finish for reliable performance and long service life in your most critical thermal processes. Our expertise guarantees a solution that integrates seamlessly into your production line, enhancing yield and process control.

Fused Quartz Glass Features:

Fused quartz glass is a special industrial glass made of silicon dioxide. It is a very good basic material. Quartz glass has a series of excellent physical and chemical properties.

1. High temperature resistance. The softening point of fused quartz glass is about 1730℃ and can be used for long time working under 1100℃~1250℃.  And working at 1450℃ in a short time.

2. Corrosion resistance. In addition to hydrofluoric acid, fused quartz glass is inert to other acids. Its acid resistance is 30 times as ceramic, 150 times as stainless steel. Especially, any other material cannot make a comparison with chemical stability of fused quartz at high temperature

3. The thermal stability is good. Thermal expansion coefficient is extremely small. And it can withstand severe temperature changes such that heating up to 1100℃ and putting it in normal temperature water will not crack.

4. The light transmittance is good. Quartz glass has good transmittance in the whole spectral band from ultraviolet to infrared. The transmittance of the visible light is above 95%. Especially in the ultraviolet spectrum band and the maximum transmittance is over 85%.

5. The electrical insulation performance is good. Resistance value of quartz glass equaling to 10000 times of ordinary glass. It is an excellent electrical insulating material and has good electrical properties even under high temperature.

As a leading China fused quartz glass supplier and manufacturer, we are providing best price as well as quality for all kinds of customized fused quartz products. We are also willing to look for long term partners who are a distributor or wholesaler specialized in fused quartz glass in local.

For prompt quotation, please contact us at below form.

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Fused quartz glasses have the excellent properties for their following features:

• High working temperature
• Thermal shock resistance
• High electrical insulation
• Optical transparency
• Chemical inertness