Fused Quartz Washing Tank Quartz Glass Wafer Cleaning Basket

Fused Quartz Washing Tank Quartz Glass Wafer Cleaning Basket

Quartz glass wafer cleaning basket is a container/tank with drilling holes made of high-purity quartz glass material with a specific lattice structure. Its design purpose is to safely fix multiple silicon wafers during high-temperature, highly corrosive chemical liquids (such as HF acid, aqua regia, SC-1, SC-2 solutions) or high-temperature deionized water cleaning processes, and allow chemical reagents to fully contact and flow through each silicon wafer, thereby achieving uniform and thorough cleaning effects.

Main application scenarios
Semiconductor chip manufacturing: In the front-end process of wafer manufacturing, it is used for key steps such as RCA standard cleaning, HF last cleaning, and brushing.
Solar photovoltaic industry: used for processes such as pre velvet cleaning, acid-base etching, and PSG (phosphosilicate glass) removal of solar silicon wafers.
Micro Electro Mechanical Systems (MEMS): Carrying silicon wafers in the etching and cleaning processes of MEMS devices.
Laboratory research and development: used for the development and testing of new materials and processes.

Special note: Although quartz is resistant to most acids and bases, it can be corroded by hydrofluoric acid (HF) because HF reacts with SiO ₂. Therefore, in processes that require the use of HF, cleaning baskets made of HF resistant plastics such as PTFE and PFA must be used.

Fused Quartz Glass Features:

Fused quartz glass is a special industrial glass made of silicon dioxide. It is a very good basic material. Quartz glass has a series of excellent physical and chemical properties.

1. High temperature resistance. The softening point of fused quartz glass is about 1730℃ and can be used for long time working under 1100℃~1250℃.  And working at 1450℃ in a short time.

2. Corrosion resistance. In addition to hydrofluoric acid, fused quartz glass is inert to other acids. Its acid resistance is 30 times as ceramic, 150 times as stainless steel. Especially, any other material cannot make a comparison with chemical stability of fused quartz at high temperature

3. The thermal stability is good. Thermal expansion coefficient is extremely small. And it can withstand severe temperature changes such that heating up to 1100℃ and putting it in normal temperature water will not crack.

4. The light transmittance is good. Quartz glass has good transmittance in the whole spectral band from ultraviolet to infrared. The transmittance of the visible light is above 95%. Especially in the ultraviolet spectrum band and the maximum transmittance is over 85%.

5. The electrical insulation performance is good. Resistance value of quartz glass equaling to 10000 times of ordinary glass. It is an excellent electrical insulating material and has good electrical properties even under high temperature.

As a leading China fused quartz glass supplier and manufacturer, we are providing best price as well as quality for all kinds of customized fused quartz products. We are also willing to look for long term partners who are a distributor or wholesaler specialized in fused quartz glass in local.

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Fused quartz glasses have the excellent properties for their following features:

• High working temperature
• Thermal shock resistance
• High electrical insulation
• Optical transparency
• Chemical inertness